Position and force sensing using strain gauges integrated into piezoelectric bender electrodes
- Creator: Seethaler, Rudolf , Mansour, Sepehr Zarif , Ruppert, Michael G. , Fleming, Andrew J.
- Resource Type: journal article
- Date: 2021
High performance nanopositioning with integrated strain and force feedback
- Creator: Fleming, Andrew J. , Leang, Kam K.
- Resource Type: conference paper
- Date: 2010